The course aims to give the attendants a basic knowledge about the different existing techniques for the microfabrication of glass. Starting from the microscopic mechanisms which are at the basis of glass micromachining, one will describe the processes to realize glass microstructures. Besides various etching techniques, replication of glass from liquid precursor materials using moulding techniques will be discussed, as well as techniques for the bonding of glass. A number of applications of glass microstructures will be discussed.
The course is structured to appeal to a wide range of R&D staff, marketing and business development managers and engineers from institutes as well as companies, directly active or interested in microfabricated glass products.
Prof Dr Martin A.M. Gijs from EPFL Swiss Federal Institute of Technology, Lausanne, Switzerland. Martin Gijs received his degree in physics in 1981 from the Katholieke Universiteit Leuven, Belgium and his Ph.D. degree in physics at the same university in 1986. He joined the Philips Research Laboratories in Eindhoven, The Netherlands, in 1987. Subsequently, he has worked there on micro-and nano-fabrication processes of high critical temperature superconducting Josephson and tunnel junctions, the microfabrication of microstructures in magnetic multilayers showing the giant magnetoresistance effect, the design and realisation of miniaturised motors for hard disk applications and the design and realisation of planar transformers for miniaturised power applications. He joined EPFL in 1997. His present interests are in developing technologies for novel magnetic devices, new microfabrication technologies for microsystems fabrication in general and the development and use of microsystems technologies for microfluidic and biomedical applications in particular.
Dr Virendra Parashar from the Institute of Microelectronics and Microsystems at Swiss Federal Institute of Technology Lausanne (EPFL). Virendra Parashar received the doctorate degree from Indian Institute of Technology, Delhi, India. From 1989 to 2000, he worked at the National Physical Laboratory- India. He was an associate researcher and visiting faculty to Republic of Korea from 2000 to 2001. In 2001, he joined the Institute of Microelectronics & Microsystemes (EPFL) where he is responsible for the technology development of fabrication of micro- and nano- structures in glasses & ceramics.