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Objectifs du cours

The course aims to give the attendants a basic knowledge about state-of-the-art RF MEMS including technology, device architecture, design and modeling, scalability, figures of merit and RF IC novel functionality and performance. Reliability and packaging will be discussed as key issues for industrial applications.

Public cible

The course intends to addresses a wide range of R&D staff, PhD candidates and/or engineers from institutes or universities, marketing and business development managers of companies active or interested in RF MEMS.


In the course, the modelling and design of an SOI BLR MEMS resonator for tens of MHz will be detailed. Scalability of MEMS resonator architectures will be addressed. The course is illustrated with most advanced examples from the literature and also with concrete RF MEMS realisations from the projects: IST MIMOSA, IST NANOTIMER, IST NANO-RF and AMICOM NOE.


Adrian M. Ionescu is a Full Professor at the Ecole Polytechnique Fédérale de Lausanne (EPFL), Switzerland. He received the B.S./M.S. and Ph.D. degrees from the Polytechnic Institute of Bucharest, Romania and the National Polytechnic Institute of Grenoble, France, in 1989 and 1997, respectively. He held staff and/or visiting positions at LETI-Commissariat à l’Énergie Atomique, Grenoble, CNRS, Grenoble, and Stanford University, Stanford, CA, in 1998 and 1999. He was a visiting professor at the Tokyo Institute of Technology, Japan in 2012.

He is the founder and director of the Nanoelectronic Devices Laboratory (Nanolab) of EPFL. The research of Nanolab focused on various research topics in the field of beyond CMOS and More-Than Moore devices and technologies. His group activities are centered on silicon micro/nano-electronics with special emphasis on the technology, design and modeling of new low power device concepts; steep slope transistors (tunnel FETs and ferroelectric FETs with negative capacitance), MEMS and NEMS devices with main emphasis on low power resonator concepts (vibrating body transistors), new materials (carbon nanotubes and graphene) to achieve novel analog and radio frequency functions and low power sensing (FinFET and stacked SiNW biosensors, CNT gas sensor arrays.

Prof. Ionescu has published more than 300 articles in international journals and conference proceedings. He is cited on the Essential Science Indicators of Web of Science in the top world wide 5’000 Engineering leading scientists, with contributed hot papers.

He is the recipient of the 2013 IBM Faculty Award and of the André Blondel Medal 2009 for contributions to the progress in engineering sciences in the domain of electronics as cited by Society of Electrical and Electronics Engineering (SEE, Paris), France. He and his PhD students won many Best Paper Awards at international conferences.

He served on the International Electron Devices Meeting and ESSDERC/ESSCIRC technical committees and he was the Technical Program Committee Chair/Co-Chair of the European Solid-State Device Research Conference in 2006 and 2013. He is a member of the Scientific Committee of the Cluster for Application and Technology Research in Europe on Nanoelectronics (CATRENE) and the academic representative of Switzerland to the European Nanoelectronics Initiative Advisory Council (ENIAC). He is an elected Member of International Planning Working Group for Nanoelectronics from 2007 and he is the European Chair of the Emerging Research Devices of ITRS from 2010.

Prof. Ionescu has been the initiator and coordinator of FET Flagship Guardian Angels for a Smarter Life, an advanced research program that was selected by the European Commission among the top four leading candidates. The Guardian Angels Consortium included 66 partners from top ranked European universities, large research institutes and leading industries.

Informations et inscription

Date et Lieu (jj.mm.aaaa)

1 day


CHF 690.00

Langue du cours


Adrian Ionescu