Objectifs du cours
The goal of this course is to introduce the participants to electron microscopy (EM) which allows the characterization of materials at the nanoscale. The course emphasizes the recent development of new techniques in electron microscopy such as
SEM related techniques and applications:
- Environmental Scanning Electron Microscope (ESEM) and application for non-conductor materials: ceramics, polymers
- Wet mode in ESEM and its application in surface technology
- Focused Ion Beam (FIB) and its application for micro and nano scale machining
- Electrical Conductivity Imaging by electron Beam Induced Current (EBIC) and its application for solar cells and semiconductors
- Electron Back Scattered Diffraction pattern (EBSD) and application on thin film technology
- Through Lens detector and its application for High Resolution imaging Beam Deceleration Technique and High resolution imaging by SEM
TEM related techniques:
- 3D tomography at nanoscale and its application for Nano composite materials
- Aberration Free techniques in Transmission Electron Microscopy (TEM) and its application for interface characterization in thin film technology
- High Resolution Electron Energy Loss Spectroscopy for interface characterization
Each subject will be illustrated by practical examples.
The course will treat and answer the following questions:
- how these instruments and techniques work
- on what physical principles they are based
- in which field of micro and nanotechnology they are used
- how their results could be interpreted for explaining a phenomenon
Public cible
R&D people in the field of microtechnology, material sciences and electronics.
Contenu
Introduction:
- Principles of electron microscope
- Resolution in electron microscopy
Scanning Electron Microscope (SEM) and Environmental SEM (ESEM):
- Principles of SEM and ESEM
- SE, BSE, GSE and TLD detectors
- EBSD, EBIC, beam deceleration
Focused Ion Beam (FIB): principle and application
Energy Dispersive X-Ray Spectrometer (EDS), limitations and resolution
Transmission Electron Microscope (TEM):
- Principles of TEM
- Different types of imaging: amplitude contrast and phase contrast
- High resolution TEM
- 3D TEM tomography
Enseignant(s)
Dr M.M. Dadras, section head of Microscopy and nanoscopy facilities at CSEM SA, Neuchâtel, Switzerland. M.M Dadras received his M.Sc. degree in Metallurgy and Materials Engineering from University of Tehran in 1980. After 6 years of experience in the industry, he continued his studies at the National Institute of Nuclear Science and Technology (I.N.S.T.N.) were he obtained his D.E.A. in 1987. He received his Ph.D. at the University of Orsay in 1990. In 1991, he joined the Institute of Structural Metallurgy of the University of Neuchâtel, first as a postdoctoral position and from 1992 as chief assistant. He held this position until 2000. From 1992 to 2000 he was also project manager and then research manager for Swissmetal. Since April 2000, he is head of the Service of Microscopy and Nanoscopy and lecturer at the Institute of Microtechnology (IMT) at the University of Neuchâtel. In April 2008, after restructuring of IMT and transfer of microscopy section to CSEM, he became section head of Microscopy and nanoscopy facilities in CSEM. His research activities are focused on microstructural studies and the relation of microstructure to the properties. Actually, his research activities are oriented to the microstructural study and the improvement of properties of thin layers used in microfabricated sensors, actuators and microsystems.
Dr Sousan Abolhassani, Responsible for the Electron Microscopy at Paul Scherrer Institute, Switzerland. Sousan Abolhassani received her B.Sc. Degree from University of Surry in UK .Sc. In Materials Science and Technology in 1979. She continued her studies at the National Institute of Nuclear Science and Technology (I.N.S.T.N.) where she obtained her D.E.A (Diplôme d’Étude Approfondies) in 1987. She received her Ph.D. in Material Science and Solid State Chemistry. 1991 from Laboratoire de Chimie Appliquée de l'Etat Solide, École Nationale Supérieure de Chimie de Paris, and Université d’Orsay, France. She then started research in electron microscopy with the specialisation in Electron Energy Loss Spectroscopy at the University of Lausanne, in collaboration with the Centre of Electron Microscopy. In 1998, she changed to Paul Scherrer Institute where she is Responsible for the Electron Microscopy. She has a long teaching experience in the field of Electron microscopy (University of Lausanne), TEM and HRTEM image simulation and EELS and its application in microtechnology (University of Neuchâtel).
Neuchâtel, Switzerland
1 day
CHF 640.00
EUR 540.00
Massoud Dadras
Sousan Abolhassani
